GAS DISTRIBUTION SYSTEM FOR OPTIMIZATION OF THE TECHNOLOGICAL PROCESS OF COATING IN AN UNBALANCED MAGNETRON SPUTTERING INSTALLATION

Ivan Uzunov, Angel Lengerov

Abstract


The paper proposes a new design solution for regulating the distribution of the working gases in the vacuum chamber of the installation (UDP -850/4) for unbalanced magnetron sputtering, which will improve the mode and quality of application of multilayer nano-coatings. Constructive documentation for manufacturing a gas distribution system has been prepared, as well as instructions for assembly to the vacuum chamber.

 


Keywords


optimization, distribution, gas, vacuum chamber, magnetron sputtering

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References


Kanev, V., G. Grigorov, High Vacuum, ed. "Technology" 1965.

Mirchev, S., "Fundamentals of vacuum technology", PU "Paisii Hilendarski" - Plovdiv 1986.

White AV, Karpenko GD, Myshkin NK Structure and methods of formation of wear-resistant surface layers, Moscow, Mechanical Engineering, 1991 (In Russian).

Nikitin MM, Vacuum spraying technology and equipment, M, Metallurgiya, 1992 (In Russian).

Danilin BS, Syrchin VK, Magnetron sputtering systems, M, Radio and communication, 1982 (In Russian).

Kuzmichev AI, Magnetron sputtering systems", Kiev, Avers, 2008 (In Russian).

Frolova ES, VG Minaycheva, Vacuum equipment "Handbook", Moscow , Mechanical Engineering, 1985 (In Russian).

Mischev, G., Einfluss der Reibung auf das dynamische Verhalten der geradlinig bewegten Maschinensysteme. 13th International Colloquium Tribology, January 15-17, 2002 Stuttgart/Ostfildern, Germany, ISBN 3-924813-48-5, vol. II, s. 867-873.

Mischev. G., Reibung in geradlinig bewegten Maschinensystemen (Führungen von Werkzeugmaschinen). Fast Print Books, 2020, ISBN:978-619-236-163-1.

Rupetsov, V. , S. Dishliev, G. Mishev, F. Franek, M. Premauer, L. Kolakleva, Research of tribological parameters of multilayer coating Ti/TiN/CrN-ml deposited on 1.2343 steel. BCC, Vol.52, Issue 3, 2020. DOI: 10.34049/bcc.52.3.5236.




DOI: https://doi.org/10.17770/etr2021vol3.6525

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