ENVIRONMENT. TECHNOLOGIES. RESOURCES. Proceedings of the International Scientific and Practical Conference

Uzunov, Ivan, Central Laboratory of Applied Physics, Bulgarian Academy of Sciences, Bulgaria

• Vol 3 (2021): Environment. Technology. Resources. Proceedings of the 13th International Scientific and Practical Conference. Volume 3 - Engineering Sciences and Production Technologies
  GAS DISTRIBUTION SYSTEM FOR OPTIMIZATION OF THE TECHNOLOGICAL PROCESS OF COATING IN AN UNBALANCED MAGNETRON SPUTTERING INSTALLATION
  Abstract  PDF